Factor of cost
• Precise humidity control
• Strictly particle requirement
• High air quality
• Energy saving equipment
• Non line down production
• High security system
• Special construction material
• High stability equipment
• High cleanliness, non-pollution material and system
• Tight project management
Solution-Energy Saving
• Building Energy Saving
− Wall
− Door & window
− Roof top
− Solar energy
− Night ventilation
• Cleanroom Energy Saving
− Few way of energy saving for cleanroom during winter:
− Cooling tower recycling system
− Variable flow system on chilled water pump
− Exhaust heat recovery system
− Using VSD water pump & exhaust fan
• Cleanliness principal
− Do Not Bring
• Not transmitted inappropriate air pressure
• Good airtight construction
• Dust removal before entering
− Awareness
• Less people & light action
• Dress clean room gown
• Use specialize CR tools
− Don’t Accumulate Work Load
• Keep wall smooth and no dead end
• Matainance and cleaning on time
• Keep space around equipment
• High speed exhaust
• Direct exhaust of pollution
• Adequate air changes
• Appropriate air flow velocity