Cleanroom Design Flow Chart
Process Layout Approach
Parts of the Cleanroom
|
FAB Clean Room |
HVAC |
Make-UP Air, Recirculation Air, Temp & RH Control, Exhaust, Diff Pressure, Chilled Water, Steam Sytem, Air Velocity, Air Change Rate |
|
Archi |
Raised Floor, EQ Layout, Vibration, Partion, Static Elec, Magnetic Interference |
|
Land |
Soil Drilling, Soil Analysis, Vibration Meas |
|
Public Utility |
City Water, Power System, Road Transportation, Gas Line |
|
Environment |
Clean Room Management, House Keeping, Air Shower, Noise Control |
|
Safety |
Fire Alarm, Gas Detection, Safety Corridor, Fire Wall, Emergency Shower, Paging, Communication, Breathing Air |
|
Power |
High Tension Power, EQ Power, Lighting Power, Emergency Power, UPS |
|
Facility |
Supply, Chemical Disgense, Gas Supply, Process Cooling Water, Drain, Waste Water Treat, Waste Reclaim, Plant Vacuum |
|
Cleanroom features
|
Environment Conditions |
Cleanliness, Temperature, Humidity, Pressure, Vibration, Noise, Easy to Clean and No Smell |
|
Flexible Space
|
Static Elimination, Monitoring System, Standardized Cleaning, Rationalization Moving Lines |
|
Prevention for Public Hazard & Disaster |
Exhaust Gas Treatments Equipment, Wastewater Treatments Equipment, Poison Gas Dilution System, Noise Prevention and Countermeasures, Easy to Maintain, Evacuation Path Signal Board, Fire System, Emergency Shower, Eyewash System, Toxic Gas Detection System, Shockpro of Countermeasures |
|
Continuous Opetation |
Back-up System, Power Failure Protection Equipment, Central Monitoring System, Energy Saving Plan |
|
Basic Consideration of Cleanroom |
|
Basic Consideration
|
Problems |
|
Environment |
Base Size Too Small, Environmental Regulation, Factory Exhaust |
|
Transport |
Distance from The Highway, Distance From the Airport and Por, Distance from The Materials Supplier |
|
Natural Condition |
Temperature and Humidity, Raining and Snowing, The Wind from Beach Side, Earthquake |
|
Cleanliness Class |
Why Need A Cleanroom, The Most Suitable Level, Temperature and Humidity Requirement, Vibration, Noise, Electromagnetic |
|
Export |
Location of Factory, Scalability of Equipment, Size Based on Demand, Operation Safety |
|
Hydropower |
Quality of The Water, The Capacity of Water & Electrical Supply, Supply Source Distance, Voltage Magnitude |
|
Move In Plan |
Staff & Equipment, Appropriate Structure, Emergency Plan |
|
Staff |
Manpower, Engineer, Education, Health Care and Culture | |
